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Engineering | DEfECT Lab

Sputtering/Evaporation system

SputterThin films of various nature, such a metals or oxides can be prepared in the same chamber by thermal or e-beam evaporation, DC or RF magnetron sputtering (co-sputtering and reactive sputtering possible too), which allows preparation of multilayers or alloys in one run. The chamber is connected to a glovebox which allows preparation of sensitive samples under inert atmosphere. The tool is an Angstrom Evovac setup.