Atomic force microscopy can be used in tapping mode to analyze the surface topography of a sample, i.e. a description of the physical shape of its surface . During the measurement, a tip (cantilever) is moved over the sample while keeping the force between tip and sample constant and allowing the z-direction to change A laser light is reflected on the cantilever and the deflection of this light is converted into a 3D map . This way nanoscale imaging of topography and roughness quantification can be achieved. In other modes, AFM can also be used to detect variations in composition, adhesion, friction, viscoelasticity, or electric and magnetic properties. In the DefectLab a Nanosurf LensAFM is available which can be integrated as a normal objective lens on an optical microscope. Nanosurf LensAFM allows mapping of areas of 110×110 µm2 size.